Deep-ultraviolet projection lithography facility
天发娱乐棋牌_天发娱乐APP-官网|下载 deep-ultraviolet scanner is a unique capability within UK academic research. It gives a 248 nanometre (nm) laser source, which gives a critical dimension of 180nm over a 200 millimetre wafer. It has a throughput of 120 wafers per hour.
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